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メタン及びエチレンプラズマによる炭素膜の調整と水素含有量の評価
https://doi.org/10.15099/00006451
https://doi.org/10.15099/00006451b85f6d5b-65c5-4a28-a9a8-666387376263
名前 / ファイル | ライセンス | アクション |
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2007-10-03 | |||||
タイトル | ||||||
タイトル | メタン及びエチレンプラズマによる炭素膜の調整と水素含有量の評価 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.15099/00006451 | |||||
ID登録タイプ | JaLC | |||||
著者 |
藤野, 健太郎
× 藤野, 健太郎× 芦田, 完× 渡辺, 国昭× 岡部, 俊夫 |
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著者別名 | ||||||
姓名 | Fujino, Kentaro | |||||
著者別名 | ||||||
姓名 | Ashida, Kan | |||||
著者別名 | ||||||
姓名 | WATANABE, Kuniaki | |||||
著者別名 | ||||||
姓名 | OKABE, Toshio | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Characterization of Hydrogen-containing Carbon Films Prepared by RF Discharge of Methane and Ethylene | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Interest has recently been shown in amorphous carbon films from the viewpoint of fuel recycling and inventory in magnetically confined fusion devices. In this study, amorphous carbon films were prepared on silicon substrates by RF discharge of methane and ethylene, and they were characterized by gas analysis and FR-IR and Raman spectroscopies. The results of gas analysis showed that the carbon film prepared by methane (a-C/CH4) contained a larger amount of hydrogen than that by ethylene (a-C/C2H4) ; the hydrogen-to-carbon rations in the films, [H]/[C], were evaluated to be 1.84 and 1.40 for a-C/CH4 and a-C/C2H4, respectively. The FT-IR and Raman spectroscopies showed that the films consisted of a carbon framework comprised of C-C and C=C bonds, but the fraction of C=C contained in the a-C/CH4 film was smaller than that in the a-C/C2H4 film. It was concluded that the difference in the hydrogen contents was mainly due to the difference in the relative contents of these bonds in the films. | |||||
書誌情報 |
富山大学水素同位体科学研究センター研究報告 = Annual Report of Hydrogen Isotope Research Center, Toyama University 巻 19, p. 47-55, 発行日 1999 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0916-8486 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11841872 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 富山大学水素同位体科学研究センター | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |