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  1. M. 各センター等 (Center)
  2. M-04. 水素同位体科学研究センター (Hydrogen Isotope Research Center)
  3. M-04-02. 紀要・研究報告等
  4. M-04-02-03. 富山大学水素同位体科学研究センター研究報告
  5. 19

メタン及びエチレンプラズマによる炭素膜の調整と水素含有量の評価

https://doi.org/10.15099/00006451
https://doi.org/10.15099/00006451
b85f6d5b-65c5-4a28-a9a8-666387376263
名前 / ファイル ライセンス アクション
annual_report19-5.pdf annual_report19-5.pdf (493.6 kB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2007-10-03
タイトル
タイトル メタン及びエチレンプラズマによる炭素膜の調整と水素含有量の評価
言語
言語 jpn
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ departmental bulletin paper
ID登録
ID登録 10.15099/00006451
ID登録タイプ JaLC
著者 藤野, 健太郎

× 藤野, 健太郎

WEKO 22317

藤野, 健太郎

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芦田, 完

× 芦田, 完

WEKO 22318

芦田, 完

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渡辺, 国昭

× 渡辺, 国昭

WEKO 22319

渡辺, 国昭

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岡部, 俊夫

× 岡部, 俊夫

WEKO 22320

岡部, 俊夫

Search repository
著者別名
姓名 Fujino, Kentaro
著者別名
姓名 Ashida, Kan
著者別名
姓名 WATANABE, Kuniaki
著者別名
姓名 OKABE, Toshio
その他(別言語等)のタイトル
その他のタイトル Characterization of Hydrogen-containing Carbon Films Prepared by RF Discharge of Methane and Ethylene
抄録
内容記述タイプ Abstract
内容記述 Interest has recently been shown in amorphous carbon films from the viewpoint of fuel recycling and inventory in magnetically confined fusion devices. In this study, amorphous carbon films were prepared on silicon substrates by RF discharge of methane and ethylene, and they were characterized by gas analysis and FR-IR and Raman spectroscopies. The results of gas analysis showed that the carbon film prepared by methane (a-C/CH4) contained a larger amount of hydrogen than that by ethylene (a-C/C2H4) ; the hydrogen-to-carbon rations in the films, [H]/[C], were evaluated to be 1.84 and 1.40 for a-C/CH4 and a-C/C2H4, respectively. The FT-IR and Raman spectroscopies showed that the films consisted of a carbon framework comprised of C-C and C=C bonds, but the fraction of C=C contained in the a-C/CH4 film was smaller than that in the a-C/C2H4 film. It was concluded that the difference in the hydrogen contents was mainly due to the difference in the relative contents of these bonds in the films.
書誌情報 富山大学水素同位体科学研究センター研究報告 = Annual Report of Hydrogen Isotope Research Center, Toyama University

巻 19, p. 47-55, 発行日 1999
ISSN
収録物識別子タイプ ISSN
収録物識別子 0916-8486
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA11841872
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
出版者
出版者 富山大学水素同位体科学研究センター
資源タイプ(DSpace)
内容記述タイプ Other
内容記述 Article
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