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ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第1報,摩擦力顕微鏡機構を利用した3次元微細構造形成の可能性 (機械要素,潤滑,工作,生産管理など)
http://hdl.handle.net/10110/1677
http://hdl.handle.net/10110/1677f645828b-786a-4d73-8745-e5b32c1bc6c4
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-12-28 | |||||
タイトル | ||||||
タイトル | ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第1報,摩擦力顕微鏡機構を利用した3次元微細構造形成の可能性 (機械要素,潤滑,工作,生産管理など) | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Friction Force Microscope | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Single Crystal Silicon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | KOH Etching | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Normal Load | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Pitch of Processing Line | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
川堰, 宣隆
× 川堰, 宣隆× 森田, 昇× 山田, 茂× 高野, 登× 大山, 達雄× 芦田, 極 |
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著者別名 | ||||||
姓名 | Kawasegi, Noritaka | |||||
著者別名 | ||||||
姓名 | Morita, Noboru | |||||
著者別名 | ||||||
姓名 | Yamada, Shigeru | |||||
著者別名 | ||||||
姓名 | Takano, Noboru | |||||
著者別名 | ||||||
姓名 | Oyama, Tatsuo | |||||
著者別名 | ||||||
姓名 | Ashida, Kiwamu | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | 3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching : 1st Report, Possibility of 3D Micro-Fabrication using the Mechanism of Friction Force Microscope | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This study proposes a new method on 3D micro fabrication using a combination technique of nano-scale processing and wet chemical etching. The (100) surface of single crystal silicon was processed by using the mechanism of friction force microscope (FFM). A processed area was protuberated in the condition where normal load is less than 372μN. The sample processed in this condition was etched by KOH solution. After the etching process, convex structure was made on processed area. The effect of processing condition on etch rate of processed area was studied. It was found that etch rate was changed with normal load, pitch of processing line and number of processing. Also, mechanism of height change was investigated under those conditions and some 3D microstructure were fabricated by these results. | |||||
書誌情報 |
日本機械学會論文集. C編 = Transactions of the Japan Society of Mechanical Engineers.C 巻 70, 号 696, p. 2533-2540, 発行日 2004-08 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03875024 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00187463 | |||||
権利 | ||||||
権利情報 | rights: 本文データは社団法人日本機械学会の許諾に基づきCiNiiから複製したものである | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 社団法人日本機械学会 | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |