@article{oai:toyama.repo.nii.ac.jp:00006538, author = {松原, 圭佑 and 園野, 雅斗 and 井上, 光浩 and 阿部, 孝之}, journal = {富山大学水素同位体科学研究センター研究報告}, month = {Mar}, note = {application/pdf, We demonstrated surface nitridation of titanium particles using the polygonal barrel-plasma treatment system. In order to verify the formation of TiN, a Ti plate was treated in our plasma treatment system. The color of the Ti plate changed from metallic to gold as a result of N_2 plasma treatment. Glow discharge optical emission spectrometry of the plasma-treated Ti plate confrrmed that nitrogen was inserted. From XPS measurements, it was also found that the nitrogen in the sample was ascribed to the formation of Ti-N bonds. It should be noted that the X-ray diffraction patterns of the Ti plate before and after the plasma treatment showed only the reflection peaks of Ti metal, supporting that the Ti-N bond formation occurred only on the surface of the plate. Subsequently, N_2 plasma treatment was applied to Ti particles. The plasma treatment using a swinging motion of the barrel containing Ti particles changed the color of the particles uniformly from gray to brown. The UV-VIS absorbance spectrum of the plasma-treated Ti particles was similar to that of the plasma-treated Ti plate. This result was considered a proof of the Ti-N bond formation on Ti particles achieved by the polygonal-barrel plasma treatment system., Article, 富山大学水素同位体科学研究センター研究報告, 31巻, 2012.03.30, pp.15-21}, pages = {15--21}, title = {多角バレルプラズマ表面改質法による金属チタン微粒子の表面窒化}, volume = {31}, year = {2012} }