@article{oai:toyama.repo.nii.ac.jp:00000495, author = {山下, 正人}, journal = {富山大学教育学部紀要. B, 理科系}, month = {Mar}, note = {application/pdf, Article}, pages = {23--33}, title = {シリコンウェハの抵抗率と最適電流}, volume = {50}, year = {1997} }