{"created":"2023-07-25T09:05:07.064459+00:00","id":3108,"links":{},"metadata":{"_buckets":{"deposit":"b2d2bbae-da9d-4db0-8646-f8232cedc1cb"},"_deposit":{"created_by":3,"id":"3108","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"3108"},"status":"published"},"_oai":{"id":"oai:toyama.repo.nii.ac.jp:00003108","sets":["496:556:557:558"]},"author_link":["10342","10308","10338","10340","10304","10351","10350","10352","10349","10346","10343","10339","10345","10341"],"item_2_alternative_title_19":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"3D Micro-Fabrication using Combination Technique of Nano-scale Processing and Chemical Etching : 3rd Report, Dependence of Enhanced Etching Effect on FIB Processing Conditions and Application to 3D Micro-Fabrication"}]},"item_2_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2005-05","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"705","bibliographicPageEnd":"1759","bibliographicPageStart":"1754","bibliographicVolumeNumber":"71","bibliographic_titles":[{"bibliographic_title":"日本機械学會論文集. C編 = Transactions of the Japan Society of Mechanical Engineers. C"}]}]},"item_2_description_15":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_2_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A simple process to fabricate 3 D microstructures on single crystal silicon is presented in this study. The area irradiated by focused ion beam(FIB) can be selectively etched in HF solution. Etching characteristics of irradiated area are studied. The etch rate of irradiated area increases with increasing dose over 3.4×10^5 C/cm^2. In addition, it can be also controlled by accelerate voltage. Subsequently, it is etched by KOH solution in order to evaluate the mechanism of this phenomenon. Dependence of surface roughness on dot pitch is evaluated. Finally, 3 D microstructures can be fabricated based on these results, which indicates a possibility of industrial application as a novel 3D micro-fabrication process.","subitem_description_type":"Abstract"}]},"item_2_description_40":{"attribute_name":"資源タイプ(DSpace)","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_2_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"10304","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000060251881","nameIdentifierScheme":"CiNii ID","nameIdentifierURI":"http://ci.nii.ac.jp/nrid/1000060251881"},{"nameIdentifier":"60251881","nameIdentifierScheme":"NRID","nameIdentifierURI":" "}],"names":[{"name":"Takano, Noboru"}]},{"nameIdentifiers":[{"nameIdentifier":"10349","nameIdentifierScheme":"WEKO"}],"names":[{"name":"OYAMA, Tatsuo"}]},{"nameIdentifiers":[{"nameIdentifier":"10350","nameIdentifierScheme":"WEKO"}],"names":[{"name":"ASHIDA, Kiwamu"}]},{"nameIdentifiers":[{"nameIdentifier":"10351","nameIdentifierScheme":"WEKO"}],"names":[{"name":"TANIGUCHI, Jun"}]},{"nameIdentifiers":[{"nameIdentifier":"10352","nameIdentifierScheme":"WEKO"}],"names":[{"name":"MIYAMOTO, Iwao"}]},{"nameIdentifiers":[{"nameIdentifier":"10345","nameIdentifierScheme":"WEKO"}],"names":[{"name":"KAWASEGI, Noritaka"}]},{"nameIdentifiers":[{"nameIdentifier":"10346","nameIdentifierScheme":"WEKO"}],"names":[{"name":"MORITA, Noboru"}]},{"nameIdentifiers":[{"nameIdentifier":"10308","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"00174714 ","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://nrid.nii.ac.jp/nrid/1000000174714 "}],"names":[{"name":"YAMADA, Shigeru"}]}]},"item_2_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"社団法人日本機械学会"}]},"item_2_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"rights: 本文データは社団法人日本機械学会の許諾に基づきCiNiiから複製したものである"}]},"item_2_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00187463","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03875024","subitem_source_identifier_type":"ISSN"}]},"item_2_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"高野, 登"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"大山, 達雄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"芦田, 極"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"谷口, 淳"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"宮本, 岩男"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"川堰, 宣隆"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"森田, 昇"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山田, 茂"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-02-16"}],"displaytype":"detail","filename":"機械論文C05-1754.pdf","filesize":[{"value":"741.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"機械論文C05-1754.pdf","url":"https://toyama.repo.nii.ac.jp/record/3108/files/機械論文C05-1754.pdf"},"version_id":"2f8fa5b3-9819-4b3c-b900-46915960e57f"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Focused Ion Beam","subitem_subject_scheme":"Other"},{"subitem_subject":"Wet Chemical Etching","subitem_subject_scheme":"Other"},{"subitem_subject":"3D Micro-Fabrication","subitem_subject_scheme":"Other"},{"subitem_subject":"Single Crystal Silicon","subitem_subject_scheme":"Other"},{"subitem_subject":"HF Solution","subitem_subject_scheme":"Other"},{"subitem_subject":"Dose","subitem_subject_scheme":"Other"},{"subitem_subject":"Accelerate Voltage","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第3報,エッチング加速作用のFIB照射条件依存性と3次元微細構造形成への応用(機械要素,潤滑,工作,生産管理など)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第3報,エッチング加速作用のFIB照射条件依存性と3次元微細構造形成への応用(機械要素,潤滑,工作,生産管理など)"}]},"item_type_id":"2","owner":"3","path":["558"],"pubdate":{"attribute_name":"公開日","attribute_value":"2007-12-20"},"publish_date":"2007-12-20","publish_status":"0","recid":"3108","relation_version_is_last":true,"title":["ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第3報,エッチング加速作用のFIB照射条件依存性と3次元微細構造形成への応用(機械要素,潤滑,工作,生産管理など)"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-25T13:58:49.496001+00:00"}