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多角バレルスパッタリング法における微粒子表面修飾へのターゲット角度の影響と収率向上に向けた装置改良
https://doi.org/10.15099/00006568
https://doi.org/10.15099/0000656823436f6a-6ee2-4a95-9026-23f2c1944de6
名前 / ファイル | ライセンス | アクション |
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01-03_annual_report34_page031to036.pdf (721.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2016-02-01 | |||||
タイトル | ||||||
タイトル | 多角バレルスパッタリング法における微粒子表面修飾へのターゲット角度の影響と収率向上に向けた装置改良 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.15099/00006568 | |||||
ID登録タイプ | JaLC | |||||
著者 |
井上, 光浩
× 井上, 光浩× 桐木, 友哉× 本多, 祐二× 品川, 宏治× 阿部, 孝之 |
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著者別名 | ||||||
姓名 | Inoue, Mitsuhiro | |||||
著者別名 | ||||||
姓名 | Kiriki, Tomoya | |||||
著者別名 | ||||||
姓名 | Honda, Yuji | |||||
著者別名 | ||||||
姓名 | Shinagawa, Koji | |||||
著者別名 | ||||||
姓名 | Abe, Takayuki | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Effects of Target Angle on Particle Surface Modification by the Polygonal Barrel-Sputtering Method and Its Improvement for Increasing Sample Yield | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Effects of the angle of the target plate on particle surface modification by the polygonal barrel-sputtering method were investigated by preparing TiO2-supported Ru (Ru/TiO2 ) samples. The sputtering with Ru was conducted at the target angles of 0, 20, and 45°. The results showed that the Ru nanoparticles deposited on the TiO2 particles had small and uniform sizes of ca. 2?4 nm, regardless of the target angle. However, the amount of Ru deposited gradually decreased with the change in the target angle from 0° to 20 and 45°. On the other hand, our sputtering system was redesigned by closing one side of the polygonal barrel and attaching a stainless-steel spring cap to the target holder located on the opposite side of the barrel, in order to avoid the spillage of particles. As a result, we succeeded in an increase in the sample yield (over 90 %), which will be useful for the practical application of the polygonal barrel-sputtering method. | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 富山大学水素同位体科学研究センター研究報告, 34巻, 2015.07.31, pp.31-36 | |||||
書誌情報 |
富山大学水素同位体科学研究センター研究報告 巻 34, p. 31-36, 発行日 2015-07-31 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13463675 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11841872 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
国立国会図書館分類 | ||||||
主題Scheme | NDLC | |||||
主題 | ZP8 | |||||
出版者 | ||||||
出版者 | 富山大学水素同位体科学研究センター | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |