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酸化物ターゲットを取り付けたバレルスパッタリング装置によるアルミフレーク表面へのSiO2修飾
https://doi.org/10.15099/00006500
https://doi.org/10.15099/000065008e3f9200-d500-4467-8c71-732369949296
名前 / ファイル | ライセンス | アクション |
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annual_report26-6.pdf (170.0 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2007-10-03 | |||||
タイトル | ||||||
タイトル | 酸化物ターゲットを取り付けたバレルスパッタリング装置によるアルミフレーク表面へのSiO2修飾 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.15099/00006500 | |||||
ID登録タイプ | JaLC | |||||
著者 |
阿部, 孝之
× 阿部, 孝之× 赤丸, 悟士× 東出, 真吾× 田口, 明 |
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著者別名 | ||||||
姓名 | Abe, Takayuki | |||||
著者別名 | ||||||
姓名 | Akamaru, Satoshi | |||||
著者別名 | ||||||
姓名 | Higashide, Shingo | |||||
著者別名 | ||||||
姓名 | Taguchi, Akira | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Surface modification of aluminum flakes with SiO2 by using the barrel-sputtering system equipped with oxide target | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We demonstrated a surface modification of aluminum flakes with SiO2 by using the barrel-sputtering system equipped with a SiO2 target. In order to find suitable sputtering conditions using the system, a SiO2 film was prepared on an Al sheet under various desired oxygen fractions, sputtering gas pressures, and substrate temperatures. XRD analysis and weight of prepared SiO2 film was determined that the suitable sputtering condition for the SiO2 film were 0% oxygen fraction, 3 Pa a total pressure, and 300 K substrate temperature. Surface coating of Al flakes by SiO2 was carried out under these conditions. It was found from SEM and EDS measurements that the surface of Al flakes was coated with a thin uniform SiO2 film. | |||||
書誌情報 |
富山大学水素同位体科学研究センター研究報告 = Annual Report of Hydrogen Isotope Research Center, Toyama University 巻 26, p. 51-56, 発行日 2006 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0916-8486 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11841872 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 富山大学水素同位体科学研究センター | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |