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ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第2報,集束イオンビーム照射を利用した3次元微細構造形成の可能性 (機械要素,潤滑,工作,生産管理など)
http://hdl.handle.net/10110/1678
http://hdl.handle.net/10110/16780d8df759-5e34-4c4b-9c73-3fd6582a3331
名前 / ファイル | ライセンス | アクション |
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機械論文C04-2541.pdf (999.4 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-12-28 | |||||
タイトル | ||||||
タイトル | ナノスケール機械加工と化学エッチングを併用した3次元極微細構造形成 : 第2報,集束イオンビーム照射を利用した3次元微細構造形成の可能性 (機械要素,潤滑,工作,生産管理など) | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Focused Ion Beam | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Single Crystal Silicon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Chemical Etching | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Gallium Ion | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Dose | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Dot Pitch | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
川堰, 宣隆
× 川堰, 宣隆× 柴田, 浩一× 森田, 昇× 芦田, 極× 谷口, 淳× 宮本, 岩男 |
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その他(別言語等)のタイトル | ||||||
その他のタイトル | 3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching : 2nd Report, Possibility of 3D Micro-Fabrication using Focused Ion Beam Process | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This study proposes the 3D micro-fabrication method on single crystal silicon using a focused ion beam (FIB) process with masking effect for chemical etching. It could be seen that the area processed by FIB remains though it was etched by KOH solution. The dependence of the masking effect on experimental conditions and its mechanism were studied by various parameters and structural analysis respectively. Some attempts to fabricate 3D micro-structures were made based on these results. Subsequently, the costs can be decreased to fabricate 3D micro-structure and the process be simplified compared to that using a traditional photoresist-masking method, owing to the simple sequential processes of the chemical etching followed by FIB process | |||||
書誌情報 |
日本機械学會論文集. C編 = Transactions of the Japan Society of Mechanical Engineers. C 巻 70, 号 696, p. 2541-2547, 発行日 2004-08 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03875024 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00187463 | |||||
権利 | ||||||
権利情報 | rights: 本文データは社団法人日本機械学会の許諾に基づきCiNiiから複製したものである | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 社団法人日本機械学会 | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |