WEKO3
アイテム
{"_buckets": {"deposit": "3ffd6578-33d6-412b-beb6-9e71212320b9"}, "_deposit": {"created_by": 3, "id": "14156", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "14156"}, "status": "published"}, "_oai": {"id": "oai:toyama.repo.nii.ac.jp:00014156", "sets": ["1575"]}, "author_link": ["164594", "164591", "164592", "22302"], "item_3_alternative_title_19": {"attribute_name": "その他(別言語等)のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "Preparation of Lithium Phosphorus Oxynitride (LiPON) Electrolytes Using the Polygonal Barrel-Sputtering System"}]}, "item_3_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2016-09-30", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "50", "bibliographicPageStart": "45", "bibliographicVolumeNumber": "35", "bibliographic_titles": [{"bibliographic_title": "富山大学研究推進機構水素同位体科学研究センター研究報告"}]}]}, "item_3_description_15": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_description": "application/pdf", "subitem_description_type": "Other"}]}, "item_3_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Lithium phosphorous oxynitride (LiPON) electrolytes for solid-state lithium batteries were prepared using the polygonal barrel-sputtering system. When sputtering was carried out at an N2 gas pressure of 4 Pa and an AC power of 100 W for 120 min using a Li3PO4 target plate, a worm-like deposition was formed on the planer silicon substrate. An N1s peak was observed at around 400 eV in the X-ray photoelectron spectroscopy survey spectrum of the sputtered sample. This N1s peak was deconvoluted into two peaks: one at 397.4 eV ascribed to P-N\u003cP bond formation and the other at 399.0 eV reflecting P-N=P bond formation. Based on these data, the formed deposit was assigned to LiPON. The ion conductivity of the prepared LiPON was evaluated by impedance measurements. A semicircle was obtained in the Cole-Cole plot, from which the ion conductivity was determined to be 1.8 ×10-6 S cm-2, close to those of typical LiPON films in the Literature (1.7 × 10-6-6.4 × 10-6 S cm-2). Thus, LiPON films can be prepared by the polygonal barrel-sputtering system.", "subitem_description_type": "Abstract"}]}, "item_3_description_40": {"attribute_name": "資源タイプ(DSpace)", "attribute_value_mlt": [{"subitem_description": "Article", "subitem_description_type": "Other"}]}, "item_3_description_6": {"attribute_name": "引用", "attribute_value_mlt": [{"subitem_description": "富山大学研究推進機構水素同位体科学研究センター研究報告, 35巻, 2016.09.30, pp.45-50", "subitem_description_type": "Other"}]}, "item_3_full_name_3": {"attribute_name": "著者別名", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "164594", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Nishizawa, Hideki"}]}, {"nameIdentifiers": [{"nameIdentifier": "164592", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "9000001343627", "nameIdentifierScheme": "CiNii ID", "nameIdentifierURI": "http://ci.nii.ac.jp/nrid/9000001343627"}], "names": [{"name": "Inoue, Mitsuhiro"}]}, {"nameIdentifiers": [{"nameIdentifier": "22302", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000090241546", "nameIdentifierScheme": "CiNii ID", "nameIdentifierURI": "http://ci.nii.ac.jp/nrid/1000090241546"}, {"nameIdentifier": "90241546", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000090241546"}], "names": [{"name": "Abe, Takayuki"}]}]}, "item_3_identifier_registration": {"attribute_name": "ID登録", "attribute_value_mlt": [{"subitem_identifier_reg_text": "10.15099/00016653", "subitem_identifier_reg_type": "JaLC"}]}, "item_3_publisher_33": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "富山大学研究推進機構水素同位体科学研究センター"}]}, "item_3_source_id_10": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA11841872", "subitem_source_identifier_type": "NCID"}]}, "item_3_source_id_8": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "13463675", "subitem_source_identifier_type": "ISSN"}, {"subitem_source_identifier": "24335908", "subitem_source_identifier_type": "ISSN"}]}, "item_3_subject_22": {"attribute_name": "国立国会図書館分類", "attribute_value_mlt": [{"subitem_subject": "ZP8", "subitem_subject_scheme": "NDLC"}]}, "item_3_version_type_16": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "西澤, 秀基"}], "nameIdentifiers": [{"nameIdentifier": "164591", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "井上, 光浩"}], "nameIdentifiers": [{"nameIdentifier": "164592", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "9000001343627", "nameIdentifierScheme": "CiNii ID", "nameIdentifierURI": "http://ci.nii.ac.jp/nrid/9000001343627"}]}, {"creatorNames": [{"creatorName": "阿部, 孝之"}], "nameIdentifiers": [{"nameIdentifier": "22302", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000090241546", "nameIdentifierScheme": "CiNii ID", "nameIdentifierURI": "http://ci.nii.ac.jp/nrid/1000090241546"}, {"nameIdentifier": "90241546", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000090241546"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-11-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "01-05_annual_report35_page045to050.pdf", "filesize": [{"value": "467.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 467900.0, "url": {"label": "01-05_annual_report35_page045to050.pdf", "url": "https://toyama.repo.nii.ac.jp/record/14156/files/01-05_annual_report35_page045to050.pdf"}, "version_id": "164cffa0-f1dc-4128-b101-f796f12911f5"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム(LiPON)電解質の調製", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム(LiPON)電解質の調製"}]}, "item_type_id": "3", "owner": "3", "path": ["1575"], "permalink_uri": "https://doi.org/10.15099/00016653", "pubdate": {"attribute_name": "公開日", "attribute_value": "2016-11-21"}, "publish_date": "2016-11-21", "publish_status": "0", "recid": "14156", "relation": {}, "relation_version_is_last": true, "title": ["多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム(LiPON)電解質の調製"], "weko_shared_id": 3}
多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム(LiPON)電解質の調製
https://doi.org/10.15099/00016653
https://doi.org/10.15099/0001665309d43b25-f9e0-448d-9111-29137f05931d
名前 / ファイル | ライセンス | アクション |
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01-05_annual_report35_page045to050.pdf (467.9 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2016-11-21 | |||||
タイトル | ||||||
タイトル | 多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム(LiPON)電解質の調製 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.15099/00016653 | |||||
ID登録タイプ | JaLC | |||||
著者 |
西澤, 秀基
× 西澤, 秀基× 井上, 光浩× 阿部, 孝之 |
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著者別名 | ||||||
姓名 | Nishizawa, Hideki | |||||
著者別名 | ||||||
姓名 | Inoue, Mitsuhiro | |||||
著者別名 | ||||||
姓名 | Abe, Takayuki | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Preparation of Lithium Phosphorus Oxynitride (LiPON) Electrolytes Using the Polygonal Barrel-Sputtering System | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Lithium phosphorous oxynitride (LiPON) electrolytes for solid-state lithium batteries were prepared using the polygonal barrel-sputtering system. When sputtering was carried out at an N2 gas pressure of 4 Pa and an AC power of 100 W for 120 min using a Li3PO4 target plate, a worm-like deposition was formed on the planer silicon substrate. An N1s peak was observed at around 400 eV in the X-ray photoelectron spectroscopy survey spectrum of the sputtered sample. This N1s peak was deconvoluted into two peaks: one at 397.4 eV ascribed to P-N<P bond formation and the other at 399.0 eV reflecting P-N=P bond formation. Based on these data, the formed deposit was assigned to LiPON. The ion conductivity of the prepared LiPON was evaluated by impedance measurements. A semicircle was obtained in the Cole-Cole plot, from which the ion conductivity was determined to be 1.8 ×10-6 S cm-2, close to those of typical LiPON films in the Literature (1.7 × 10-6-6.4 × 10-6 S cm-2). Thus, LiPON films can be prepared by the polygonal barrel-sputtering system. | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 富山大学研究推進機構水素同位体科学研究センター研究報告, 35巻, 2016.09.30, pp.45-50 | |||||
書誌情報 |
富山大学研究推進機構水素同位体科学研究センター研究報告 巻 35, p. 45-50, 発行日 2016-09-30 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13463675 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 24335908 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11841872 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
国立国会図書館分類 | ||||||
主題Scheme | NDLC | |||||
主題 | ZP8 | |||||
出版者 | ||||||
出版者 | 富山大学研究推進機構水素同位体科学研究センター | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |