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新しく開発した微粒子表面修飾用多角バレルプラズマ化学蒸着法の概要
https://doi.org/10.15099/00006557
https://doi.org/10.15099/0000655701fce2a4-b3d0-498f-a04f-bd1dc377705e
名前 / ファイル | ライセンス | アクション |
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01-03_annual_report33_page021to027.pdf (1.1 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2014-07-11 | |||||
タイトル | ||||||
タイトル | 新しく開発した微粒子表面修飾用多角バレルプラズマ化学蒸着法の概要 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 微粒子表面修飾 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 多角バレルプラズマCVD法 | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.15099/00006557 | |||||
ID登録タイプ | JaLC | |||||
著者 |
本多, 祐二
× 本多, 祐二× 井上, 光浩× 阿部, 孝之 |
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著者別名 | ||||||
姓名 | Honda, Yuji | |||||
著者別名 | ||||||
姓名 | Inoue, Mitsuhiro | |||||
著者別名 | ||||||
姓名 | Abe, Takayuki | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Outline of the Polygonal Barrel-Plasma Chemical Vapor Deposition Method Newly Developed for Particle Surface Modification | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This report describes the outline of the “polygonal barrel-plasma chemical vapor deposition (CVD) method” and its units in detail. This method is embodied as a new particle surface modification system consisting of 5 parts: 1) a gas-supply unit, 2) a vacuum chamber unit (including gas shower and barrel electrodes), 3) a radio frequency (RF) power supply unit (including matching box), 4) a vacuum pumps, and 5) a control unit. In this method, a hexagonal barrel containing particles is rotated or oscillated during plasma CVD, leading to the efficient and uniform surface modification of individual particles with various materials, especially carbon and metal oxides. In addition, the film thicknesses of the deposited materials can be controlled very easily by changing the RF power and treatment time. Thus, the polygonal barrel-plasma CVD method allows controllable surface modification of particles and is useful for research and development of functionalized particles | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 富山大学水素同位体科学研究センター研究報告, 33巻, 2014.06.30, pp.21-27 | |||||
書誌情報 |
富山大学水素同位体科学研究センター研究報告 巻 33, p. 21-27, 発行日 2014-06-30 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13463675 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11841872 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
国立国会図書館分類 | ||||||
主題Scheme | NDLC | |||||
主題 | ZP8 | |||||
出版者 | ||||||
出版者 | 富山大学水素同位体科学研究センター | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |