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Delta-sigma modulation microphone sensors employing a resonant tunneling diode with a suspended microstrip resonator
http://hdl.handle.net/10110/00020427
http://hdl.handle.net/10110/0002042719350e04-092b-4180-bec6-f666ae5a5924
名前 / ファイル | ライセンス | アクション |
---|---|---|
Sensor Review_40(5)_pp535-542 (2.0 MB)
|
Creative Commons Attribution Non-commercial 4.0 International
(creativecommons.org/licenses/by-nc/4.0/) |
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2020-10-02 | |||||
タイトル | ||||||
タイトル | Delta-sigma modulation microphone sensors employing a resonant tunneling diode with a suspended microstrip resonator | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | delta-sigma modulator | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | resonant tunneling diode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ultrasonic sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | suspended microstrip resonator | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Maezawa, Koichi
× Maezawa, Koichi× Ito, Tetsuo× Mori, Masayuki |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose and demonstrate novel microphone sensors based on the frequency delta-sigma modulation (FDSM) technique, which replaces the conventional delta-sigma modulator in the delta-sigma analog-todigital converters. A key of the FDSM technology is to employ a voltagecontrolled oscillator (VCO) for converting an input analog signal to a 1-bit pulse-density modulated digital signal. High-performance sensors can be realized if the VCO is replaced by an oscillator whose oscillation frequency depends on an external physical parameter. Microphone sensors are proposed based on FDSM that employs a suspended microstrip disk resonator, where the backside ground plane is replaced by a thin metal diaphragm. A resonant tunneling diode (RTD) oscillator is also employed, as the performance of these sensors significantly depends on the oscillation frequency. To demonstrate the basic operation of the proposal, prototype devices were fabricated with an InGaAs/AlAs RTD. A satisfactory noise shaping property, which is a significant nature of delta-sigma modulation, was demonstrated over three decades for the prototype device. A sound-sensing peak was also clearly observed when applying 1 kHz sound from a speaker. High-performance ultrasonic microphone sensors can be realized if we fabricate the sensors using a thin InP substrate with high-frequency oscillator design. In this study, we proposed and experimentally demonstrated novel microphone sensors, which are promising as future ultrasonic sensors that have high dynamic range with wide bandwidth. |
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引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Sensor Review, Vol. 40 No. 5, pp. 535-542 | |||||
書誌情報 |
Sensor Review 巻 40, 号 5, p. 535-542, 発行日 2020-07-10 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0260-2288 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10622851 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1108/SR-03-2020-0044 | |||||
権利 | ||||||
権利情報 | This author accepted manuscript is deposited under a Creative Commons Attribution Non-commercial 4.0 International (CC BY-NC) licence. This means that anyone may distribute, adapt, and build upon the work for non-commercial purposes, subject to full attribution. If you wish to use this manuscript for commercial purposes, please contact permissions@emerald.com | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | Emerald Publishing Limited | |||||
資源タイプ(DSpace) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |